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JEM-2100F Vacuum System

Index

Vacuum Manifolds

I use manifold here to describe a continuous enclosed volume that cannot be further segmented by valves. Pressure is not necessarily equal throughout a manifold due to conductance.

Manifold Description Pressure Gauge
Camera Projection chamber and detector area Pi3
Stage Load-lock manifold — pumped down before specimen insertion Pi4
Column Pipe Electron optical column and connecting pipe hosting SIP1 Pe, Pi1, SIP1
DP Manifold High-vacuum distribution from the diffusion pump outlet Pi6
RP2 Manifold Routes between RP2 and DP Manifold, Camera, and Stage none
Gun Field emission electron gun chamber SIPs

Vacuum Pumps

Pump Type Function
RP1 Oil Rotary Pump Diffusion pump backing
RP2 Oil Rotary Pump General purpose roughing
DP Diffusion Pump Camera chamber and column hi vac
SIP1 Ion Pump Column hi vac
SIP, SIP Ion Pump Gun UHV

Valves

All of the valves on the 2100F vacuum system are ultimately electronically controlled, with the exception of V5 which is manually actuated by rotating the sample holder to insert a sample into the column. Solenoid valves are directly controlled by an electrical signal, while pneumatic valves have one or more associated solenoids that switch air pressure to actuate the valve. The 3-way solenoid valves used in this system have two ports connected through the valve body at all times, while a third port connection is gated through the valve. The vacuum diagram is topologically simplified to only show the gated connections.

Valve Function Type Part #
V1 Gun Isolation Pneumatic
V2 Camera Isolation Pneumatic
V5 Load Lock to Column
V8 Camera to DP Pneumatic Butterfly EM-23080
V9 DP Isolation Pneumatic Butterfly EM-23080
V10 DP Manifold to Pipe Pneumatic
V17 RP1 to Buffer Tank
V21 Load Lock Manifold to Load Lock
V24 Stage Roughing 3-way Solenoid HVB51-X0360
V26 Stage to DP 3-way Solenoid HVB51-X0360
V27 DP/Pipe Roughing 3-way Solenoid HVB51-X0360
V28 Camera Roughing 3-way Solenoid HVB51-X0360
V31 Camera Vent Vent Solenoid USB3-6-3-OJ
V34 Stage Vent Vent Solenoid USB3-6-3-OJ
V35 DP Vent USB3-6-3-OJ
V37 RP1 Vent AG3X
V38 RP2 Vent Solenoid AG3X
V50

On the column

Under the table