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< 2100F Vacuum System

DP Manifold

The high-vacuum distribution manifold on the outlet side of the diffusion pump. Distributes DP pumping capacity to the main chambers (Camera via V8, Stage via V26, Column via V10) and connects to the RP2 roughing manifold via V27. Also has an N2 vent via V35.

DP RP2 SIP SIP1 SIP2 Buffer Tank V10 V2 V1 V5 Pi5 RP1 Pi6 Pi3 Pi4 V17 V8 V9 V27 V34 V24 V28 V37 V38 V31 V35 V26 Pi1 Pe V50 V21 V36 Air Vent N2 Vent

Connects

Photos

Pi6 DP Manifold V9 V28 RP2 Manifold Camera V31 V27 V35
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Pi3 V8 V9 V35 V27 DP Manifold Camera N2 RP2 Manifold Exposure Meter
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V10 DP Manifold Pipe
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V24 Pi4 V34 DP Manifold V26 Stage RP2 Manifold
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V9 V8 DP Manifold Camera DP
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RP2 Manifold V28 V27 V35 DP Manifold Camera
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V28 V38 RP2 Manifold V27 DP Manifold
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